OCCA Weekly Webinar - Thin Film Characterization using Spectroscopic Ellipsometry
Venue: Webinar
Date: Wednesday 22nd June 2022
Time: 14:30 – 15:30
Our Series 7 of OCCA Weekly Webinars continues with "Thin Film Characterization using Spectroscopic Ellipsometry" presented by Jeremy van Derslice of J A Woollam. The webinar will take place via Zoom on Wednesday 22 June at 2:30pm. This webinar is free to attend, simply register below and you'll receive further details & joining instructions in due course.
Abstract:
Spectroscopic ellipsometry is used to measure nanometer-scale layers used in microelectronics, data storage, flat panel displays and many other thin-film applications. Ellipsometers inherently detect the change in polarisation that occurs as light reflects or transmits from a material structure. The polarisation change is represented as an amplitude ratio, Ψ, and the phase difference, Δ. The measured response depends on optical properties and thickness of individual materials. Thus, ellipsometry is primarily used to determine film thickness and optical constants. However, it is also applied to characterise composition, crystallinity, roughness, doping concentration, and other material properties associated with a change in optical response. This webinar will describe the fundamental ellipsometry measurement and introduce data analysis techniques. It will also include an overview of primary applications and associated data analysis techniques.
Speaker Profile
Jeremy van Derslice, Applications Group, J A Woollam
Jeremy Vanderslice received his Master’s degree in Mechanical Engineering from the University of Nebraska. He is working towards his Ph.D. in Engineering where he is studying pulsed-laser deposited films using spectroscopic ellipsometry and is currently building a chamber for in-situ ellipsometric characterisation of PLD-grown films.
